楊申語臺灣大學:機械工程學研究所翁永進Weng, Yung-JinYung-JinWeng2010-06-302018-06-282010-06-302018-06-282009U0001-0807200909034600http://ntur.lib.ntu.edu.tw//handle/246246/187239微奈米結構元件是未來應用於數位光電、通訊、平面顯示器與生物醫療等檢測儀器的關鍵零組件，而傳統微元件的複製量產技術，需要製造程序複雜的剛性模具與昂貴的精密設備，以及高溫、高壓、冷卻的過程，因而有製程耗時、成本高昂，可視化與可控性亦受限制的缺點。論文致力於研發低溫、低壓及快速成型的磁性軟模微奈米結構壓印製程技式。首先整合微機電製程、雷射加工/氣體微熱壓印微結構製程及陽極氧化法等技術製作微奈米結構圖案，再利用矽膠(PDMS) 複合磁性材料進行鑄造翻模，製作具適當結構強度及彈性之微奈米結構磁性軟模具，接著製備高分子材料，先期以氣體輔助粉末壓印微成形技術，進行微結構複製壓印成形，進行初步探討。隨後，並分別使用自行研發的磁性輔助壓印製程技術(包含電磁式可溫控壓印製程及電磁式UV壓印製程)，進行微奈米結構元件的磁性輔助壓印製程之製造與檢測探討，最後開發出磁性滾輪壓印製程設備，同時成功製備磁性滾輪，並針對其關鍵製備技術進行分析與探討。 本論文之主要研究內容包括：微奈米結構模具製程技術與應用探討、氣體輔助粉末壓印微成形技術分析與探討、磁性輔助微奈米結構壓印製程探討、微奈米元件檢測分析及相關製程開發探討、磁性輔助滾輪微壓印製程設備開發與探討。研究成功建立以微機電製程、雷射加工/氣體微熱壓印微結構製程及陽極氧化法製程，進行微奈米結構模具製備，輔以矽膠(PDMS)複合磁性材料鑄造翻膜、微奈米磁性軟模壓印複製配合磁性輔助壓印製程/磁性滾輪壓印製程之整合技術平台。在製程上，此法兼具開創性與新穎性；在製造特性上具有簡易、快速、低成本與可量產等優勢，提供微結構元件在複製製程之一較佳選擇，有助於微奈米系統科技產業提升。Micro-nano structural components are the key components to be applied in future instrumentation for digital optoelectronics, telecommunications, flat panel displays, and bio-medicine. The conventional micro-component production technology requires a rigid mold of complicated manufacturing processes, expensive precision equipment, high temperature, and high pressure cooling processes. Therefore, the process has disadvantages, such as time-consuming, costly, and limited in visualization and controllability. This study aimed to develop a micro-nano structural imprinting processing technology of low temperature, low pressure, and rapid prototyping magnetic soft mold. It first integrated the micro-electro-mechanical process, laser processing/gas micro-thermo imprinting micro-structural manufacturing process, Anodic Aluminum Oxide (AAO) method, and nano oxidation technology to produce micro-nano structural patterns. Then, it employed PDMS composite magnetic materials to create a micro-nano structural magnetic soft mold of appropriate structural strength and flexibility by casting mold, and then prepared polymer materials. In the initial stage, it discussed the imprint forming of micro structural reproduction, using gas-assisted powder imprinting micro-forming technology. Then, it employed self-developed magnetic-assisted imprinting processing technology (including electromagnetic controllable imprinting process and electromagnetic UV imprinting process) to discuss the production and detection of magnetic-assisted imprinting processes for micro-nano structural components. Finally, it developed a magnetic roller imprinting process equipment, and successfully produced magnetic rollers, while analyzing and exploring key manufacturing technologies. he main research contents included discussion on micro-nano structural mold processing technology and its applications, analysis and exploration on gas-assisted powder imprinting micro-forming technology, discussion on magnetic-assisted micro-nano structural imprinting process, discussion on micro-nano component detection analysis and development of related processing procedures, and discussion and development of magnetic-assisted roller micro imprinting processing equipment. his study successfully established the integrated technological platform of micro-electro-mechanical processing procedures, laser processing/gas micro-thermo imprinting of micro structure processing procedures, AAO method, nanooxidation processing procedures to prepare micro-nano structural molds supplemented with PDMS composite magnetic material casting imprinting film, and micro nano magnetic soft mold imprinting reproduction, according to magnetic-assisted imprinting processing procedure/magnetic roller imprinting processing procedure. This method is innovative and creative in terms of processing procedures, and has advantages of simple, fast, inexpensive, and available for mass production, as well as providing a better alternative in the reproduction of micro structural components, contributing to the upgrading of the science, and technological industry of micro nano systems.致謝........................................................................................................................ IV文摘要................................................................................................................II文摘要................................................................................................................IV錄........................................................................................................................IV目錄..................................................................................................................IV目錄..................................................................................................................IV一章 研究背景.1 微奈米科技的發展........................................................................................1.2 微製造與精密複製成型技術現況.................................................................2.2.1 微製造技術.......................................................................................2.2.2 精密複製成型技術............................................................................3.2.3 氣體輔助壓印技術............................................................................6.3 研究動機........................................................................................................6.4 具體研究方向與目標.....................................................................................9.5 論文內容與架構............................................................................................10二章 文獻回顧.1 微奈米壓印成型技術之相關文獻與應用......................................................15.1.1 熱壓式奈米壓印微影........................................................................15.1.2 紫外光固化式奈米壓印微影............................................................16.1.3 軟微影技術.......................................................................................17.1.4 曲面微奈米壓印................................................................................18.1.5 奈米壓印與光微影整合技術............................................................18.1.6 磁性輔助壓印....................................................................................19.2 滾輪壓印成型微奈米結構技術相關文獻......................................................19.2.1 滾輪壓印技術相關文獻....................................................................19.2.2 滾輪微結構製作相關文獻................................................................20.3 陽極氧化鋁相關文獻.....................................................................................21.4 奈米壓痕相關文獻........................................................................................22.5 文獻總結........................................................................................................24三章 研究方法與實驗設備.1 微奈米結構模具的製作.................................................................................36.1.1 微機電製程與雷射加工/氣體微熱壓印微結構製程.........................36.1.1.1 微機電製程.............................................................................36.1.1.2 雷射加工/氣體微熱壓印微結構製程.....................................36.1.2 陽極氧化法.......................................................................................37.2 磁性軟模開發與製備.....................................................................................37.2.1 開發與製備方法的選擇......................................................................37.2.2 創新複合式澆鑄技術..........................................................................38.3 磁性輔助壓印設備之設計與開發.................................................................39.3.1 電磁式可溫控壓印機台開發..............................................................39.3.2 電磁式UV 壓印機台開發..................................................................40I.3.3 壓印機台之壓力均勻性測試..............................................................40.4 實驗材料........................................................................................................40.4.1 可紫外光固化高分子材料..................................................................40.4.2 其他複製材料.....................................................................................41.5 量測儀器之簡介............................................................................................41.5.1 阻劑結構基礎特性奈米壓痕量測.......................................................41.5.2 微奈米結構表面形貌與表面粗糙度量測...........................................41.5.3 壓印基板的表面疏水特性量測...........................................................42.5.4 微透鏡陣列元件的光學性質檢測.......................................................42.5.5 光波導元件的光場和光損耗量測.......................................................42四章 微奈米結構模具製程技術與應用探討.1 微機電製程技術製作微透鏡陣列.................................................................56.2 雷射加工/氣體微熱壓印製作微透鏡陣列.....................................................57.3 陽極氧化技術製備微奈米陣列多孔微結構..................................................57.3.1 鋁板及電解液.....................................................................................57.3.2 二次陽極氧化製作微奈米陣列孔洞...................................................58.3.3 不同電壓大小對孔洞間距的影響.......................................................58.3.4 低角度X-Ray 分析.............................................................................58.5 本章結論..........................................................................................................59五章 氣體輔助粉末壓印微成形技術分析與探討.1 氣體輔助粉末壓印設備及相關材料製備......................................................65II.1.1 奈米粉流體壓印原理..........................................................................66.1.2 PDMS 材料的準備與使用..................................................................67.1.3 粉流體壓印設備、模具結構、光阻劑...............................................67.2 微奈米結構元件製作.....................................................................................68.2.1 塑膠薄膜氣體熱壓成型翻模..............................................................68.2.2 直接澆鑄成型翻模..............................................................................69.2.3 粉流體微奈米結構元件壓印實驗.......................................................69.3 粉流體壓印結果與探討.................................................................................69.3.1 複製性比較.........................................................................................70.3.2 成形性探討.........................................................................................70.3.3 表面粗糙度分析..................................................................................70.4 本章結論..........................................................................................................70六章 磁性輔助微奈米結構壓印製程探討.1 磁性軟模(MSM)關鍵製備技術探討.............................................................77.1.1 結構組成評估與分析..........................................................................77.1.2 機械性質探討.....................................................................................78.2 電磁式可溫控壓印(EMI-TC)製程技術探討.................................................79.2.1 設備、模具結構、PC 塑膠薄膜與PMMA 阻劑製備........................79.2.2 磁性軟模製作.....................................................................................80.2.3 複製成型實驗.....................................................................................80.2.3.1 PC 塑膠薄膜熱壓複製成型......................................................80III.2.3.2 PMMA 阻劑熱壓複製成型......................................................80.2.4 壓印結果探討.....................................................................................81.2.5 小節結論......................................................................................... .. 82.3 電磁式UV 壓印(EMI-UV)製程技術探討................................................. .. 82.3.1 電磁式壓印設備、微透鏡壓印模具與UV-LED 曝光設備........... .. 83.3.2 磁性軟性模具製備.......................................................................... .. 83.3.3 壓力均勻度測試.............................................................................. .. 83.3.4 可紫外光固化阻劑壓印複製成型................................................... .. 84.3.5 複製成型性探討.............................................................................. .. 84.3.6 複製成品檢測 ................................................................................ .. 85.3.7 小節結論......................................................................................... .. 85.4 磁性輔助曲面微結構壓印製程探討......................................................... .. 86.4.1 曲面壓印設備與複製材料製備....................................................... .. 86.4.2 磁性軟模製備................................................................................. .. 87.4.3 電磁式壓印製程.............................................................................. .. 87.4.4 磁性輔助可撓式磁模曲面壓印成型結果探討............................... .. 88.4.5 小節結論......................................................................................... .. 89.5 本章結論...................................................................................................... .. 89七章 微結構元件檢測分析及相關製程開發探討.1 氣體輔助光波導微結構元件複製壓印及光學檢測分析.............................115.1.1 光波導微結構元件複製壓印製程................................................... ..115X.1.1.1 壓印模具製備....................................................................... ..116.1.1.2 緩衝層(氧化層)製作............................................................. ..116.1.1.3 阻劑性質、製備與塗佈........................................................ ..116.1.2 奈米壓痕檢測波導元件之結果與分析........................................... ..116.1.2.1 不同負載力量之壓痕硬度檢測............................................ ..116.1.2.2 微結構強度對光損失之影響................................................ ..117.2 真空輔助微成型技術應用於製作脊樑式微結構之研究.............................117.2.1 真空輔助微結構充填設備、模具結構、光阻劑..............................118.2.2 脊樑式微結構製程............................................................................119.2.3 實驗結果探討...................................................................................119.2.4 小節結論......................................................................................... ..120.3 本章結論.................................................................................................... ..121八章 磁性輔助滾輪微壓印製程設備開發與探討.1 磁性滾輪(軸)關鍵製備技術探討與機械性質檢測.................................... ..126.1.1 磁性滾輪(軸)材料選用與相關製作步驟探討................................. ..126.1.2 磁性滾柱最佳選用區段之探討....................................................... ..127.1.2.1 磁粉比例選用....................................................................... ..127.1.2.2 磁柱軸向尺寸選用區段........................................................ ..128.1.3 磁性滾輪製備(不含微結構)............................................................ ..128.1.4 磁性滾輪機械性質探討....................................................................129.2 磁性滾輪壓印機台設計開發..................................................................... ..129.2.1 滾輪................................................................................................. ..129.2.2 壓印力機構..................................................................................... ..129.2.3 磁性微結構滾輪滑動裝置即導料輸送裝置................................. ..130.2.4 陣列型紫外線(UV-LED)固化裝置............................................... ..130.2.5 滾輪加熱裝置................................................................................ ..130.3 磁性滾輪壓印之特性探討......................................................................... ..131.3.1 壓印均勻性檢測與比對....................................................................131.3.2 壓印力量檢測與探討...................................................................... ..131.4 本章結論.................................................................................................... ..132九章 結論.1 研究成果總結............................................................................................ ..150.1.1 微奈米結構模具與磁性軟模開發................................................... ..150.1.2 粉流體壓印及磁性壓印製程開發................................................... ..150.1.3 微奈米結構相關成型分析與應用................................................... ..151.1.4 磁性滾壓設備開發與滾軸製作....................................................... ..151.2 原始貢獻.................................................................................................... ..152.3 未來研究方向與展望................................................................................. ..153考文獻..............................................................................................................157錄A：PC 性質表............................................................................................. 165錄B：PET 性質表........................................................................................... 165錄C：奈米壓痕理論........................................................................................ 166I錄D：陽極氧化微結構模具的相關應用....................................................... .. 169.1 生醫細胞培養............................................................................................. 169.2 表面粗糙度對細胞繁殖之影響探討......................................................... .. 169錄E：PDMS 模具平面壓印變形幾何公式推導.............................................. 172錄F：作者簡歷................................................................................................1769597811 bytesapplication/pdfen-US磁性輔助奈米壓印磁性軟模複合式澆鑄技術磁性滾輪magnetic nanoimprintmagnetic soft moldcomposite castingmagnetic rollerthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/187239/1/ntu-98-D93522024-1.pdf