A Novel Micromechanical Mode-Localized Resonator Utilizing Anti-Resonating Structures

Liu, J.-R.J.-R.LiuLo, Y.-C.Y.-C.LoLi, W.-C.W.-C.LiWEI-CHANG LI2021-02-042021-02-042019https://www.scopus.com/inward/record.url?eid=2-s2.0-85074351678&partnerID=40&md5=5731686f719f1df47c0982e0a723c9f1https://scholars.lib.ntu.edu.tw/handle/123456789/546892A Novel Micromechanical Mode-Localized Resonator Utilizing Anti-Resonating Structuresconference paper10.1109/MEMSYS.2019.88708342-s2.0-85074351678