2018-08-272024-05-14https://scholars.lib.ntu.edu.tw/handle/123456789/661247摘要：下世代的電子設備不僅要求良好的電子性能，還要求其可彎曲、可拉伸、尺寸小、 重量輕，譬如可折疊太陽能電池，可撓性顯示熒幕，等等。然而，作為柔性基底的 高分子材料不能像晶矽或者玻璃基底那樣承受高溫，以至很多成熟和先進的半導體 製程不能加以應用。 我們面臨的挑戰是如何用低溫製程在高分子材料上做出高品質的電子元件。雷射材 料加工具有高能量密度、極快的加工速度以及高度可控性等優點。而且，通過選擇 合適的波長，可以達到選擇性的加工目標材料，而不會傷害到柔性基底。 銅銦鎵硒作為薄膜太陽能電池的吸收層，具有極高的吸收率，可以非常有效的吸收 太陽光。所以相對於其他的半導體材料，銅銦鎵硒只需很薄的一層，就可以非常有 效的吸收太陽光。這個優點使得銅銦鎵硒特別適合用來製作柔性基底的太陽能電池 。 我們提出以下幾項創新性的利用雷射加工技術在柔性基底上製作可撓的銅銦鎵硒太 陽能電池的技術。 1)銀納米線的雷射焊接技術用以提高透明導電膜的導電性。 2)雷射輔助的摻雜活化技術以提高透明導電氧化物比如鎵摻雜的氧化鋅的導電性。 3)在柔性基底上雷射輔助的銅銦鎵硒材料合成技術。 4)在柔性基底上雷射輔助製造可撓的銅銦鎵硒太陽能電池。 我們將爭取於三年內完成以上四個項目<br> Abstract: Devices of the next generation should not only perform well but also be flexible and stretchable with smaller size and lighter weight, such as foldable solar cells, flexible displays, etc. However, unlike Si or glass substrate, polymers as flexible substrates cannot endure high temperature such that many mature and advanced processing technologies in semiconductor industry are not applicable to the devices on polymer substrates. The challenge has been how to manufacture high quality devices with low temperature processes on polymer substrates. Laser material processing has the advantage of high energy intensity, fast processing speed, high controllability, etc. Moreover, based on the choice of laser light wavelength it can selectively processes target material without damaging the substrates. As the absorbing layer of thin film solar cells Cu(InGa)Se2(CIGS) material has high absorption coefficient and strongly absorbs sunlight. A much thinner film is required than of other semiconductor materials. CIGS layers are thin enough to be flexible, allowing them to be deposited on flexible substrates. We propose several innovative techniques of laser material processing for fabrication of CIGS thin film Cu(InGa)Se2(CIGS) solar cells on polymer substrates as following. 1) Laser welding of Ag nanowires in transparent conductive electrode films for better electrical conductance. 2) Laser assisted dopant activation in transparent conductive oxide (TCO) such as gallium doped zinc oxide (GZO). 3) Laser assisted material synthesis of CIGS thin films on polymer substrates. 4) Laser assisted fabrication of flexible CIGS solar cells on polymer substrates The above four tasks will be four projects we are going to accomplish in three years.太陽能電池銅銦鎵硒柔性基底雷射材料加工雷射輔助材料合成Solar cellCIGSflexible devicelaser material processinglaser assisted material synthesis