Ho, W.-J.W.-J.HoTsai, P.-H.P.-H.TsaiChang, C.-M.C.-M.ChangSyu, H.-J.H.-J.SyuCHING-FUH LIN2018-09-102018-09-102016http://www.scopus.com/inward/record.url?eid=2-s2.0-84971357107&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/396531Photovoltaic performance of a thin-film silicon solar cell based on light-trapping enhanced and surface-recombination reduced using an optimization of metal-assisted chemical etching (MACE) and TiO2 passivation was demonstrated. The silver nanoparticles were used as etched mask in MACE process to obtain a nanoporous silicon surface layer. The optical reflectance, dark and photovoltaic current-voltage, external quantum efficiency as a function of the MACE times are measured and compared. Significant improving efficiency of 38% was obtained for the cell with 10-second MACE time and 15-nm-thick TiO2 passivation. © 2014 IEEE.light trapping; metal-assisted chemical etching (MACE); nanoporous; passivation; surface recombination; thin-film silicon solar cell[SDGs]SDG7Efficiency; Etching; Nanoelectronics; Passivation; Silicon; Silver; Solar cells; Solar power generation; Thin film solar cells; Thin films; Titanium dioxide; Light-trapping; Metal-assisted chemical etching; Nano-porous; Surface recombinations; Thin-film silicon solar cells; Silicon solar cellsconference paper10.1109/INEC.2014.7460456