Reconstruction at the interface of one cycle of trimethylaluminum and water on GaAs(111)A-2?2 from atomic layer deposition

Fanchiang, Y.-T.Y.-T.FanchiangChiang, T.-H.T.-H.ChiangPi, T.-W.T.-W.PiWertheim, G.K.G.K.WertheimKwo, J.R.J.R.KwoMINGHWEI HONG2019-12-272019-12-272015https://scholars.lib.ntu.edu.tw/handle/123456789/443324Reconstruction at the interface of one cycle of trimethylaluminum and water on GaAs(111)A-2?2 from atomic layer depositionjournal article10.7567/APEX.8.1266022-s2.0-84948733608https://www.scopus.com/inward/record.uri?eid=2-s2.0-84948733608&doi=10.7567%2fAPEX.8.126602&partnerID=40&md5=d5e6b4105f6b8ba8250b1ed8557fa0af