In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor

Lee, Chi-YuanChi-YuanLeeCheng, Ying-ChouYing-ChouChengChen, Yung-YuYung-YuChenChang, Pei-ZenPei-ZenChangWu, Tsung-TsongTsung-TsongWuChen, Ping-HeiPing-HeiChenChen, Wen-JongWen-JongChenPING-HEI CHENPEI-ZEN CHANGTSUNG-TSONG WU2009-01-212018-06-292009-01-212018-06-292004http://ntur.lib.ntu.edu.tw//handle/246246/106987application/pdf290558 bytesapplication/pdfen-USIn Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor10.1143/JJAP.43.36112-s2.0-4344581335WOS:000222503400073http://ntur.lib.ntu.edu.tw/bitstream/246246/106987/1/11.pdf