Dept. of Electr. Eng., National Taiwan Univ.Liao, Da-YinDa-YinLiaoChang, Shi-ChungShi-ChungChangYen, Shou-RenShou-RenYenSHI-CHUNG CHANG2007-04-192018-07-062007-04-192018-07-061993-05http://ntur.lib.ntu.edu.tw//handle/246246/2007041910032370application/pdf587699 bytesapplication/pdfen-USDaily scheduling for R&D semiconductor fabricationjournal article10.1109/ROBOT.1993.291868http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910032370/1/00291868.pdf