Fabrication of programmed defects for non-imaging EUV mask inspection by helium ion beam direct milling

Chien-Lin LeeSheng-Wei ChienKuen-Yu Tsai*KUEN-YU TSAI2019-10-312019-10-312017https://scholars.lib.ntu.edu.tw/handle/123456789/429886Fabrication of programmed defects for non-imaging EUV mask inspection by helium ion beam direct millingconference paper