Area dependent deep depletion behavior in the capacitance-voltage characteristics of metal-oxide-semiconductor structures with ultra-thin oxides

Chen, K.-M.K.-M.ChenHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-84859372155&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/363038Area dependent deep depletion behavior in the capacitance-voltage characteristics of metal-oxide-semiconductor structures with ultra-thin oxidesjournal article10.1063/1.3664767