A 2x2 Mechanical Optical Switch With a Thin MEMS Mirror

Fan, Kuang-ChaoKuang-ChaoFanLin, Wu-LangWu-LangLinChiang, Li-HungLi-HungChiangChen, Shou-HengShou-HengChenChung, Tien-TungTien-TungChungYang, Yao-JoeYao-JoeYang2011-02-112018-06-282011-02-112018-06-282009-05http://ntur.lib.ntu.edu.tw//handle/246246/222867en-USA 2x2 Mechanical Optical Switch With a Thin MEMS Mirrorjournal article