Dynamic nano-scale surface profilometry using stroboscopic interferometry

Chen, L.-C.L.-C.ChenLai, H.-W.H.-W.LaiHuang, Y.-T.Y.-T.HuangChang, J.-C.J.-C.ChangChang, C.C.C.C.ChangChen, J.-L.J.-L.ChenLIANG-CHIA CHEN2020-01-132020-01-132007https://scholars.lib.ntu.edu.tw/handle/123456789/447884[SDGs]SDG7Dynamic nano-scale surface profilometry using stroboscopic interferometryconference paper10.1109/IECON.2007.44601842-s2.0-49949108454https://www.scopus.com/inward/record.uri?eid=2-s2.0-49949108454&doi=10.1109%2fIECON.2007.4460184&partnerID=40&md5=bf245b0b9d8e5998a6475ce655f15508