Full-field chromatic confocal surface profilometry employing digital micromirror device correspondence for minimizing lateral cross talks

Chen, L.-C.L.-C.ChenChang, Y.-W.Y.-W.ChangLi, H.-W.H.-W.LiLIANG-CHIA CHEN2020-01-132020-01-132012https://scholars.lib.ntu.edu.tw/handle/123456789/447854Full-field chromatic confocal surface profilometry employing digital micromirror device correspondence for minimizing lateral cross talksjournal article10.1117/1.OE.51.8.0815072-s2.0-84880721656https://www.scopus.com/inward/record.uri?eid=2-s2.0-84880721656&doi=10.1117%2f1.OE.51.8.081507&partnerID=40&md5=976a007e618198726bab3815aea725ea