Innovative simultaneous confocal full-field 3D surface profilometry for in situ automatic optical inspection (AOI)

Chen, L.-C.L.-C.ChenChang, Y.-W.Y.-W.ChangLIANG-CHIA CHEN2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/447869Innovative simultaneous confocal full-field 3D surface profilometry for in situ automatic optical inspection (AOI)journal article10.1088/0957-0233/21/6/0653012-s2.0-77952334879https://www.scopus.com/inward/record.uri?eid=2-s2.0-77952334879&doi=10.1088%2f0957-0233%2f21%2f6%2f065301&partnerID=40&md5=c91c716bb80f27bca5f6ab38621d0ec6