2013-06-012024-05-18https://scholars.lib.ntu.edu.tw/handle/123456789/714579摘要：超導量子干涉元件(SQUID)是世界上已實用化的磁性感測元件中最為靈敏的一種，其靈敏度可達 1 fT/Hz1/2，並已經被商品化實際應用於各種微小磁場量測，如: Magnetic Property Measurement System (MPMS, Quantum Design, Inc)、Magnetoencephalography system (MEG, Elekta)。目前已被商品化的SQUID 仍是以低溫超導SQUID 為主，高溫超導SUQID 由於高溫超導材料的特性造成製作難度增加且良率不高，因此高溫超導SQUID 尚未被普遍商品化，但根據報導指出，氦氣的存量已經越來越少，預估在2015 年後氦氣的價格可能翻漲30 倍以上，需要利用液態氦來進行冷卻的低溫SQUID 系統其運行成本將大幅上昇，因此開發以高溫超導SQUID 為主的磁性量測系統顯得有急迫性與龐大的商業潛力。 本計劃主要有三大目標，(1) 與協力廠商合作建置大面積高溫超導薄膜濺鍍系統，製作高品質之大面積高溫超導薄膜。(2) 設計與製作大面積高溫超導SQUID 磁量計以提升其在77 K 下工作時的磁場靈敏度在1 kHz 低於10 fT/Hz1/2 及在1 Hz 低於30 fT/Hz1/2。(3) 將製作出的超靈敏高溫超導SQUID磁量計整合至低磁場核磁共振系統以應用於生物磁性量測。 預計本計劃完成後將與協力廠商擁有大面積高品質超導薄膜製作技術並開發出以超靈敏大面積高溫超導SQUID 磁量計為核心之低磁場核磁共振系統。<br> Abstract: Superconducting quantum interference device (SQUID) of which the sensitivity is up to 1 fT/Hz1/2 is the most sensitive magnetic sensor in the practical magnetic applications and has been integrated to some commercial magnetic measurement systems, such as Magnetic Property Measurement System (MPMS, Quantum Design, Inc)、Magnetoencephalography system (MEG, Elekta)。Currently, most commercial products of SQUID are mainly based on the scheme of low-Tc SQUID but not the high-Tc SQUID. The extraordinary ceramic characteristic of high-Tc superconducting material causes the difficulty and low yield of high-Tc SQUID fabrication. Therefore, the high-Tc SQUID-based measurement system is rare in the commercial market. However, it was reported that the world reserves of helium are running out and the prices of helium are expected to increase by up to a factor of 30 after 2015. At that time the running cost of low-Tc SQUID-based measurement system will be dramatically increasing. Consequently, the developments of high-Tc SQUID-based measurement systems are urgent and have huge potential of commercialization. In this project, there are three goals: (1) to obtain the high quality high-Tc superconducting thin film with large area, we will collabroate with the supporting company to build a sputter system for large area deposition. (2) We will design and fabricate the ultrasensitive high-Tc SQUID by the large area high-Tc superconducting thin film. We expect to achieve a magnetic field noise better than 10 fT/Hz1/2 at 1 kHz and 30 fT/Hz1/2 at 1 Hz at 77 K. (3) We will integrate the ultrasensitive high-Tc SQUID to the ultra-low filed NMR system, magnetic relaxation measurement system and the magnetic immunoassay system for biomagnetic applications. After finishing this project, we expect to hold the key technology of large area high quality high-Tc superconducting thin film deposition and the ultrasensitive high-Tc SQUID for ultra-low field NMR system.大面積高溫超導薄膜高溫超導SQUID低磁場核磁共振生醫檢測large area superconducting thin filmhigh-Tc SQUIDultra-low field NMRbiomedical detection