Chen, Y.-J.Y.-J.ChenShih, W.-P.W.-P.ShihKao, C.-K.C.-K.KaoChang, P.-Z.P.-Z.Chang2011-02-112018-06-282011-02-112018-06-282009-11http://ntur.lib.ntu.edu.tw//handle/246246/223068en-USDesign and analysis of tunable superconducting resonator utilizing micromachined tunable capacitorjournal article