Chen, Wen-LiangWen-LiangChenChen, Huei-JiunnHuei-JiunnChenTing, Chun-ChihChun-ChihTingChen, Sih-LiSih-LiChen2008-11-122018-06-282008-11-122018-06-282002http://ntur.lib.ntu.edu.tw//handle/246246/86511en-USApplication of 3C Duct Design Method in Semiconductor Factory Process Exhaust Systemsjournal article