臺灣大學: 電機工程學研究所傅立成彭元知Peng, Yuan-ZhiYuan-ZhiPeng2013-03-272018-07-062013-03-272018-07-062011http://ntur.lib.ntu.edu.tw//handle/246246/253958傳統的原子力顯微鏡，受限於壓電致動的小行程，通常只能掃描較小的範圍。在本論文中，提出了一結合壓電致動與電磁致動，兩種高精度定位器的大範圍原子力顯微鏡掃描平台。其中，壓電致動器提供奈米精度的8 μm2小範圍掃描模式，而其高速掃描能力與具備至少20 nm 方均根誤差與500μm2大範圍定位能力的精密電磁致動平台結合，更可掃描出具有100μm以上的大範圍影像。 本論文提出的平台包括四組電磁致動器、一單體的串聯式折撓導引機構、渦電流阻尼器、與一商業型xyz三軸壓電定位器。為了達成原子力顯微鏡的掃描，還設計了兩組拋物線型的壓縮彈簧在x與y軸方向，用來強化結構的去耦合能力與剛性，也能補償部分附載的重量。此外，獲取兩軸雷射干涉儀的奈米級精密回受訊號，一多輸入多輸出版適應性滑動模式控制器，與其他三種傳統控制器比較後被選出，可以有效的處理系統兩軸間耦合、不確定因素如未模擬參數、與包含掃圖時的外在環境干擾。實際的實驗數據與原子力顯微鏡的掃圖應用成果也展示了所設計之平台的出色定位能力。Conventional atomic force microscope suffers from the limitation of small scanning scale, due to the short travelling range of piezoelectric actuation. In this thesis, a large measurement-range AFM scanning stage which combines both fine positioners respectively with piezoelectric actuation and electromagnetic one is proposed. While the piezoelectric positioner provides high speed scanning in an 8 μm2 frame with nanometer resolution, the precision electromagnetic positioner is capable of scanning a large image and position samples in a 500 μm2 large field with at least 29 nm rms positioning error. The overall stage consists of 4 pairs of electromagnetic actuator, monolithic serial flexure guidance, an eddy current damper, and a commercial xyz piezoelectric positioner. To do the AFM scanning, two pairs of parabolic compression springs in x- and y-axis are designed to enhance the decoupling structure and stiffness, as well as to compensate the loading in vertical direction. Moreover, obtaining the precise feedback signals from a 2-axis laser interferometer, an MIMO adaptive sliding mode controller, which is prior to three other conventional controllers, is used to overcome the unmodeled system uncertainties, coupling motion and external noises, including the scanning disturbances. Experiments and application results are presented, indicating the promising positioning and scanning ability of the proposed stage.8153553 bytesapplication/pdfen-US精密運動控制電磁驅動適應性順滑模式控制原子力顯微鏡precision motion controlelectromagnetic actuationadaptive sliding mode controlAFMthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/253958/1/ntu-100-R98921006-1.pdf