Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping

CHEE-WEE LIUGuo, Ruey-ShanRuey-ShanGuoChen, ArgonArgonChenLiu, CheeweeCheeweeLiuLin, A.A.LinLan, M.M.LanCHEE-WEE LIU2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0033328942&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350499Modeling and optimization of wafer-level spatial uniformity with the use of rational subgroupingconference paper