Optimized O/Si composition ratio for enhancing Si nanocrystal based luminescence in Si-rich SiO<inf>x</inf> grown by PECVD with argon diluted SiH<inf>4</inf>

Chang, C.-H.C.-H.ChangHsieh, C.-H.C.-H.HsiehChou, L.-J.L.-J.ChouGONG-RU LIN2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-63049115488&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340873Optimized O/Si composition ratio for enhancing Si nanocrystal based luminescence in Si-rich SiO<inf>x</inf> grown by PECVD with argon diluted SiH<inf>4</inf>conference paper