2016-08-012024-05-15https://scholars.lib.ntu.edu.tw/handle/123456789/665878摘要：線性與旋轉動件是精密機械設備中不可或缺的關鍵元件，該技術領域或設備發展上皆需要高精密度量測和校正技術的配合。常見的量測與校正系統有雷射干涉儀、自動視準儀與光學尺。雷射干涉儀在眾多校正系統中具備最高量測解析度~0.1 nm，但其體積龐大、鏡組複雜，且售價相對昂貴，因此大多數用於實驗室的精密量測與機台定期離線校正。自動視準儀可以準確地量測被測面的雙軸傾側角(Pitch, Yaw)，但卻無法測量軸向位移。光學尺是目前機台上最常見之位移量測裝置，體積小與模組化為其主要優勢；然而，隨著機台致動軸數目和行程要求，累積誤差和成本都會成比例增加。 本計畫運用「光學讀取頭」中的光儲存雷射做為核心，研發同時具備有微米振動及長行程位移兩種量測功能的精密量測系統。當雷射由被測鏡面反射回雷射共振腔時，會與主光源相互調制，進而產生微弱自混現象，解析此現象所產生的訊號變化，即可獲得微米級振動訊息，更進一步亦能由其周期性的強度極值訊號獲得長行程線性位移訊息。此種技術亦歸屬於光干涉量測方法，初步估計量測解析度可達327.5 nm。本計劃也將運用「光學讀取頭」具備俯仰和搖擺角度量測的自動視準儀功能，來輔助精密量測系統之校準架設。由於「光學讀取頭」的緊緻和模組化結構，十分有利於組裝與架設，透過本計畫之研發來開展發揮其多軸精密量測的功能，將有助於精密量測與校正儀器技術之提升和運用推廣。 <br> Abstract: Linear and rotary positioning elements are the crucial parts in the precision mechanical equipment. In the field of the technological and equipment developments, high precision measurements and calibrations are very needful process. The typical measurement and calibration instruments are laser interferometer, autocollimator, and optical scale. In comparison with diverse calibration systems, the laser interferometer achieves the best measurement resolution of ~0.1 nm. Because of its bulky, complicate optical devices, and relatively high price It is commonly used for precision measurements in laboratory and for off-line machine calibrations,. The autocollimator can accurately measure pitch and yaw angles of the detected surface but cannot simultaneously acquire its translational displacement. Due to advantages of compactness and modular construction, the optical scale has been widely applied in the machines as displacement measuring device. However according to increasing actuation axes and stroke-increment, the accumulated error and cost grow proportionally. In this project we will utilize the optical storage laser of the optical pickup unit (OPU) as the core element to develop a precision measurement system, which combines the both functions for simultaneously detecting micron vibration and long stroke displacement. While the reflected laser beam from the detected surface comes back to the laser resonator, a tiny self-mixing phenomenon will be modulated together with the emitting laser beam. Through analyzing the phenomenon, the signal information of the micron vibration can be acquired. Furthermore through processing the periodic amplitude maxima, the long stroke displacement can be also deduced. This technique can be classified as a kind of optical interference measurement method. Based on our preliminary analysis, its measurement resolution is estimated at 327.5 nm. The pitch and yaw detection function of the autocollimator in the OPU will be also integrated to assist the arrangement and setup of this precision measurement system. Because of its compactness and modular construction of the OPU, it can be easily installed and set up for diverse precision measurement applications. Furthermore through our research and development for expanding multi-axis measurement function, it will enhance the techniques of the precision measurement and calibration instruments and widen their application fields.光儲存雷射自混現象光學讀取頭干涉儀自動視準儀多軸量測Optical storage laserSelf-mixingOptical pickup unitInterferometerAutocollimatorMulti-axis measurement.