Enhancement of Ga-doped zinc oxide film properties and deposition rate by multiple deposition using atmosphere pressure plasma jet

Yu-Yi ChenJia-Yang JuangJIA-YANG JUANG2018-09-102018-09-102017-02http://scholars.lib.ntu.edu.tw/handle/123456789/399691Enhancement of Ga-doped zinc oxide film properties and deposition rate by multiple deposition using atmosphere pressure plasma jetjournal article10.1016/j.jallcom.2016.09.320