S.-W. LaiJ.-F. KiangJEAN-FU KIANG2018-09-102018-09-102009-10http://scholars.lib.ntu.edu.tw/handle/123456789/352419[SDGs]SDG7A CMOS-MEMS sngle-chip dal-axis groscopeconference paper10.1109/impact.2009.53821772-s2.0-77950850461