2024-05-182024-05-1814695https://scholars.lib.ntu.edu.tw/handle/123456789/716071Designmodeling and fabrication of microelectromechanical systems (MEMS) with applications in biomedical engineering and radio frequency and optical communications. Micromechanics and dynamics related to MEMS. Nanomanufacturingbiosensors and nanoactuators. Theoretical and experimental solid mechanics.微機電系統微奈米加工應用力學