Recessed oxynitride dots on self-assembled Ge quantum dots grown by LPD

CHEE-WEE LIUKuo, P.-S.P.-S.KuoHsu, B.-C.B.-C.HsuChen, P.-W.P.-W.ChenChen, P.S.P.S.ChenCHEE-WEE LIU2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-8344269383&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/309364Recessed oxynitride dots on self-assembled Ge quantum dots grown by LPDjournal article10.1149/1.1785911