Sputter damage in Si (0 0 1) surface by combination of C60 + and Ar+ ion beams

Yu, B.-Y.B.-Y.YuLin, W.-C.W.-C.LinChen, Y.-Y.Y.-Y.ChenLin, Y.-C.Y.-C.LinKEN-TSUNG WONGShyue, J.-J.J.-J.Shyue2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-56949100797&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340025application/pdf727632 bytesapplication/pdf[SDGs]SDG7Sputter damage in Si (0 0 1) surface by combination of C60 + and Ar+ ion beamsjournal article10.1016/j.apsusc.2008.07.1322-s2.0-56949100797