A MEMS electrostatic resonator for a fast-scan STM system

Liao, H.-H.H.-H.LiaoShen, H.-H.H.-H.ShenLiao, B.-T.B.-T.LiaoYang, Y.-J.Y.-J.YangChen, Y.-C.Y.-C.ChenYAO-JOE YANGPai, W.-W.W.-W.Pai2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/448516[SDGs]SDG7A MEMS electrostatic resonator for a fast-scan STM systemconference paper10.1109/NEMS.2010.55924582-s2.0-78649236143https://www.scopus.com/inward/record.uri?eid=2-s2.0-78649236143&doi=10.1109%2fNEMS.2010.5592458&partnerID=40&md5=e637cd6dbba18e4f2a70c8e1cb312aaa