Simultaneous detection of translational and angular displacements of micromachined elements

Hwu, E.-T.E.-T.HwuHung, S.-K.S.-K.HungYang, C.-W.C.-W.YangHwang, I.-S.I.-S.HwangHuang, K.-Y.K.-Y.HuangKUANG-YUH HUANG2020-01-132020-01-132007https://scholars.lib.ntu.edu.tw/handle/123456789/447757Simultaneous detection of translational and angular displacements of micromachined elementsjournal article10.1063/1.28177502-s2.0-36549074536https://www.scopus.com/inward/record.uri?eid=2-s2.0-36549074536&doi=10.1063%2f1.2817750&partnerID=40&md5=5a61c3a0edf90c3ef8e2dcca9bb13568