A light-activated optopiezoelectric thin-film actuator for microfluidic applications

Wang, H.-H.H.-H.WangWu, T.-J.T.-J.WuHsu, C.-C.C.-C.HsuLee, C.-K.C.-K.LeeYU-HSIANG HSUCHIH-KUNG LEEHsu C.-C.2020-04-282020-04-282015https://scholars.lib.ntu.edu.tw/handle/123456789/486131A light-activated optopiezoelectric thin-film actuator for microfluidic applicationsconference paper10.1117/12.20798732-s2.0-84931840680https://www.scopus.com/inward/record.uri?eid=2-s2.0-84931840680&doi=10.1117%2f12.2079873&partnerID=40&md5=1c1f6a0c753bf2c73ddb431833bd9aba