High-Performance Metal/SiO2/InSb Capacitor Fabrication by Photoenhanced Chemical Vapor Deposition

Sun, Tai-PingTai-PingSun李嗣涔Liu, Kou-ChenKou-ChenLiuPanf, Y. M.Y. M.Panf楊聲震Lee, Si-ChenSi-ChenLeeYang, Seng-JennSeng-JennYang2009-01-222018-07-052009-01-222018-07-051990http://ntur.lib.ntu.edu.tw//handle/246246/108146en-USHigh-Performance Metal/SiO2/InSb Capacitor Fabrication by Photoenhanced Chemical Vapor Depositionjournal article