2024-05-182024-05-1812458https://scholars.lib.ntu.edu.tw/handle/123456789/716583Nanolithography process, equipment, and software technologiesNanoscale integrated-circuit design for manufacturability and invariabilityNanoscale detection and control systemsMultiobjective-robust-optimal controlSystem identificationConvex optimization and its engineering applications奈米微影製程設備與軟體技術奈米積體電路可製造性與抗變異性設計奈米尺度偵測與控制系統多準則強健最佳控制系統識別凸最佳化及其工程應用