A Study on the Mechanism of a New High-Speed Scanning Miniature Nano-Measurement Probe

Chen, J. Y.J. Y.ChenFan, K.C.K.C.Fan2010-10-192018-06-282010-10-192018-06-282005-01http://ntur.lib.ntu.edu.tw//handle/246246/217082en-USA Study on the Mechanism of a New High-Speed Scanning Miniature Nano-Measurement Probejournal article10.4028/www.scientific.net/KEM.295-296.71