Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition

Liu, C.W.C.W.LiuTseng, Y.D.Y.D.TsengHuang, Y. S.Y. S.HuangLiuCW2009-03-252018-07-062009-03-252018-07-061999http://ntur.lib.ntu.edu.tw//handle/246246/148145application/pdf106635 bytesapplication/pdfen-USSubstitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor depositionjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/148145/1/08.pdf