2012-08-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/679550摘要：壓電式能量擷取技術經過近十年之發展，已有長足的進步，並且於近幾年內，以微機電技術製作的微形發電裝置(MEMS Generator)在功率輸出的進展亦呈穩定增長。幾家主要的Power IC 供應商亦開始評估以“微機電微形發電技術製作可供電給應用電路”的發電元件 (power generator IC)，但依目前的進展，仍需5~10年左右的時間跨越產品化的基本技術門檻。此計畫將延續過去團隊在MEMS Generator 上的發展基礎，進一步改進材料及製程，希望在計畫結束前，單體的功率密度能超越 1mW/cm3/g2 的基本技術門檻。在界面電路上，主動切換電路亦被證明能有效提昇功率的輸出，但因MEMS Generator 的輸出電壓過低，使得這類效率提昇電路難以應用，此計畫將引入同步整流以及柔性切換等技術，希望可以進一步提昇MEMS Generator 的功率輸出。在實際應用時，因能量輸出有限，通常需要一段較長時間累積能量，再一次供給應用電路使用，因此低功率低電壓下的能源儲存電路亦非常重要，此計畫亦將結合過去發展的主動式切換電路應用於儲電電容的技術，進一步改進其操作電壓以及功率以配合MEMS Generator 之運作。<br> Abstract: In the past decade, the vibration energy harvesting technologies based on piezoelectric materials have been studied intensively and been improved constantly. The power outputs of MEMS Generators are also steadily improved year by year. The major power IC vendors are now evaluating the possibility to develop generator IC products for generating and supplying power to the application circuits. However, from the forecast based on the current improvement paces, it is expected to meet the targeting performance for another decade. In this project, the research team will continually improve the overall performance of MEMS generators by improving the piezoelectric thin film material and the processing of the devices, and try to improve the power density of MEMS generators to 1mW/cm3/g2&not;, which is considering the first targeting power density level for typical application requirements. In the other end, the active switching interfacing circuits has been proved to improve the piezoelectric energy harvesting transducer output power 2 to 4 folds, but it is hardly to apply to MEMS generators because of too low voltage and power level. In this project, we will try to introduce the synchronous switching and soft switching techniques for integrating the active switching interfacing circuit to MEMS generator and improving the overall output power. In the generic application scenario, typically the power generated is stored for a long period and the application circuit and sensors are then turned on for a short period. The temporarily energy store circuit is thus important for this kind of power management condition. In this project, we will also improve the active switching capacitor charging circuit developed before for interfacing with the low-voltage and low-power-level conditions of MEMS generators.微機電壓電材料氣膠沉積法懸臂樑能量擷取MEMSpiezoelectric materialaerosol depositioncantilever beampower harvesting