Yeh, Y.Y.YehChiu, C.C.ChiuLee, C.C.LeeLi, C.-H.C.-H.LiChen, T.-Y.T.-Y.ChenGUO-DUNG JOHN SU2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-34247524260&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/331975We have fabricated low-stress polyimide membranes for use as high-resolution variable optical attenuator (VOA). Polyimide membranes are assembled with fiber collimators to perform 3-D beam spoiling that varies the optical power with 0.01-dB resolution. The measured residual stress and Young's modulus of the polyimide membrane are 3.2 MPa and 15 GPa, respectively. The 41-μm deformation of the membrane is demonstrated by the electrostatic force with 170 volts. The 0.46-dB insertion loss and >15-dB dynamic range are achieved at 1550-nm wavelength. © 2007 IEEE.Large stroke; Low stress; Polyimide; Variable optical attenuator (VOA)Dynamic range; Optical power; Polyimide membrane; Variable optical attenuator (VOA); Elastic moduli; Electrostatic force; Insertion losses; Optical collimators; Polyimides; Three dimensional; Waveguide attenuatorsjournal article10.1109/JSTQE.2007.8932702-s2.0-34247524260