A CMOS MEMS Gas Sensor Using Monolayer Protected Gold Nano-Clusters Coating on Three-Dimensional Interdigitated Electrodes

Y. C. ChenC. Y. ChangH. L. LuC. J. LuWEI-CHENG TIAN2018-09-102018-09-102012-10http://scholars.lib.ntu.edu.tw/handle/123456789/374198A CMOS MEMS Gas Sensor Using Monolayer Protected Gold Nano-Clusters Coating on Three-Dimensional Interdigitated Electrodesconference paper