A mask-free fabrication of SU-8/silicon spherical microprobe

WEN-PIN SHIHTsai, Yao-ChuanYao-ChuanTsaiWu, Ming-DaoMing-DaoWuShih, Wen-PinWen-PinShih2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-79960059837&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/363646A mask-free fabrication of SU-8/silicon spherical microprobejournal article10.1016/j.mee.2010.12.091