Influence of sputtering power on the electrical properties of In-Sn-Zn oxide thin films deposited by high power impulse magnetron sputtering

Li, Z.-Y.Z.-Y.LiChen, S.-C.S.-C.ChenHuo, Q.-H.Q.-H.HuoLiao, M.-H.M.-H.LiaoDai, M.-J.M.-J.DaiLin, S.-S.S.-S.LinYang, T.-L.T.-L.YangSun, H.H.SunMING-HAN LIAO2021-02-042021-02-042019https://www.scopus.com/inward/record.url?eid=2-s2.0-85075546892&partnerID=40&md5=c02f8b31c073faff00f21bff2942be9ehttps://scholars.lib.ntu.edu.tw/handle/123456789/547498[SDGs]SDG7Influence of sputtering power on the electrical properties of In-Sn-Zn oxide thin films deposited by high power impulse magnetron sputteringjournal article10.3390/coatings91107152-s2.0-85075546892