Wang, Jiun-MinJiun-MinWangLiu, Kuan-ChunKuan-ChunLiuKo, Kai-ChungKai-ChungKoYang, Lung-JiehLung-JiehYangShih, Wen-PinWen-PinShih2013-04-112018-06-282013-04-112018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/257179609255 bytesapplication/pdfen-USBuckled-type valves integrated by parylene micro-tubesconference paper10.1016/j.sna.2006.01.04610.1109/SENSOR.2005.1496502http://ntur.lib.ntu.edu.tw/bitstream/246246/257179/1/82.pdf