Development of electromagnetic scanning stage for astigmatic profilometer

Chang, B.-C.B.-C.ChangDing, R.-F.R.-F.DingJuang, B.-J.B.-J.JuangKUANG-YUH HUANGBIING-CHWEN CHANG2020-01-132020-01-132015https://scholars.lib.ntu.edu.tw/handle/123456789/447734Development of electromagnetic scanning stage for astigmatic profilometerconference paper10.1109/ICMA.2015.72378182-s2.0-84955268948https://www.scopus.com/inward/record.uri?eid=2-s2.0-84955268948&doi=10.1109%2fICMA.2015.7237818&partnerID=40&md5=99b43289b0686ef2a349105954e6bc59