LineDiff entropy: Lossless layout data compression scheme for maskless lithography systems

Tang, C.-K.C.-K.TangSu, M.-S.M.-S.SuYI-CHANG LU2020-06-162020-06-162013https://scholars.lib.ntu.edu.tw/handle/123456789/502238LineDiff entropy: Lossless layout data compression scheme for maskless lithography systemsjournal article10.1109/LSP.2013.22614932-s2.0-84877897981https://www.scopus.com/inward/record.uri?eid=2-s2.0-84877897981&doi=10.1109%2fLSP.2013.2261493&partnerID=40&md5=551996b372d5c3b87a3c1aebdccdf665