A process for the formation of submicron V-gate by micromachined V-grooves using GaInP/GaAs selective etching technique

Chiu, H.-W.H.-W.ChiuHo, N.-S.N.-S.HoSHEY-SHI LU2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0035446925&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/293604A process for the formation of submicron V-gate by micromachined V-grooves using GaInP/GaAs selective etching techniquejournal article10.1109/55.944326