Nearly defect-free Ge gate-all-around FETs on Si substrates

CHEE-WEE LIU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-84863045902&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/365227Nearly defect-free Ge gate-all-around FETs on Si substratesconference paper10.1109/IEDM.2011.6131676