Modeling, scheduling, and prediction in wafer fabrication systems using queueing Petri net and genetic algorithm

Dept. of Comput. Sci. & Inf. Eng., National Taiwan Univ.Wen, Hung-WeHung-WeWenFu, Li-ChenLi-ChenFuLI-CHEN FU2007-04-192018-07-052007-04-192018-07-052001http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021249application/pdf624528 bytesapplication/pdfen-USModeling, scheduling, and prediction in wafer fabrication systems using queueing Petri net and genetic algorithmconference paper10.1109/ROBOT.2001.933169http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021249/1/00933169.pdf