A step-by-step experiment of 3C-SiC hetero-epitaxial growth on 4H-SiC by CVD

Xin, B.B.XinJia, R.-X.R.-X.JiaHu, J.-C.J.-C.HuTsai, C.-Y.C.-Y.TsaiLin, H.-H.H.-H.LinZhang, Y.-M.Y.-M.ZhangHAO-HSIUNG LIN2020-06-112020-06-112015https://scholars.lib.ntu.edu.tw/handle/123456789/500385A step-by-step experiment of 3C-SiC hetero-epitaxial growth on 4H-SiC by CVDjournal article10.1016/j.apsusc.2015.09.0902-s2.0-84949500366https://www.scopus.com/inward/record.uri?eid=2-s2.0-84949500366&doi=10.1016%2fj.apsusc.2015.09.090&partnerID=40&md5=817f78e73c7b17b63bd557cebc93a26b