Sen-Yeu YangJing-Tang WuYing-Ta ChuYi-Hao HuangSEN-YEU YANG2021-11-222021-11-222009https://scholars.lib.ntu.edu.tw/handle/123456789/587635CO2 Gas-Assisted Micro Hot Embossing Process for Large-Area Replication of Microstructuresconference paper