The fringe-capacitance of etching holes for CMOS-MEMS

Wang, Y.-T.Y.-T.WangHu, Y.-C.Y.-C.HuChu, W.-C.W.-C.ChuChang, P.-Z.P.-Z.ChangPEI-ZEN CHANG2020-04-282020-04-282015https://scholars.lib.ntu.edu.tw/handle/123456789/486810The fringe-capacitance of etching holes for CMOS-MEMSjournal article10.3390/mi61114452-s2.0-84949565148https://www.scopus.com/inward/record.uri?eid=2-s2.0-84949565148&doi=10.3390%2fmi6111445&partnerID=40&md5=50e5f93436ac168bdbb07ad490a2be3a