On-line process optimization and control using the sequential design of experiments

Sachs E.RUEY-SHAN GUOHa S.Hu A.2020-03-062020-03-061990https://scholars.lib.ntu.edu.tw/handle/123456789/472444On-line process optimization and control using the sequential design of experimentsconference paper10.1109/VLSIT.1990.111027https://www2.scopus.com/inward/record.uri?eid=2-s2.0-0025682329&doi=10.1109%2fVLSIT.1990.111027&partnerID=40&md5=a52a8e0efc765080db0a48eef30c0098