Modeling and performance evaluation for automated material handling systems in a 300 mm foundry fab

Dept. of Mech. Eng., National Taiwan Univ.Huang, Han-PangHan-PangHuangWang, Chun-TsongChun-TsongWang2007-04-192018-06-282007-04-192018-06-282002-05http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021160application/pdf680723 bytesapplication/pdfen-USModeling and performance evaluation for automated material handling systems in a 300 mm foundry fabjournal article10.1109/ROBOT.2002.1013716http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021160/1/01013716.pdf