3-D surface profilometry for both static and dynamic nano-scale full field characterization of AFM micro cantilever beams

Chen, L.-C.L.-C.ChenFan, K.-C.K.-C.FanLin, C.-D.C.-D.LinChang, C.C.C.C.ChangKao, C.-F.C.-F.KaoChou, J.-T.J.-T.ChouLIANG-CHIA CHEN2020-01-132020-01-132005https://scholars.lib.ntu.edu.tw/handle/123456789/4478913-D surface profilometry for both static and dynamic nano-scale full field characterization of AFM micro cantilever beamsconference paper10.1117/12.6146832-s2.0-29244433563https://www.scopus.com/inward/record.uri?eid=2-s2.0-29244433563&doi=10.1117%2f12.614683&partnerID=40&md5=36b76d707d8c912277e05caebfce3c2e