王春馬廣仁陳貴賢柯琪林麗瓊2020-03-312020-03-312001https://scholars.lib.ntu.edu.tw/handle/123456789/481888離子濺鍍法成長矽碳氮薄膜及其機械性質研究=Ion Beam Sputtered Growth and Mechanical Properties of SiCN Filmsjournal article10.6409/JMSE.200103.0038